IP Library Granted Patent US 5,328,973
Granted Patent Utility
US 5,328,973 · App. 07/922,507

Radiation-sensitive mixture with a polymeric binder containing units of .alpha.,.beta.-unsaturated carboxamides

Inventors: Horst Roeschert, Georg Pawlowski, Klaus-Juergen Przybilla
Patented Case View Patent ↗
Granted: Jul 12, 1994 Filed: Jul 31, 1992
Inventors
Horst Roeschert
Georg Pawlowski
Klaus-Juergen Przybilla
Assignee (at issue)
Hoechst GmbH

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Quick Facts
Patent No.
US 5,328,973
App. No.
07/922,507
Filed
1992-07-31
Granted
1994-07-12
Kind
A