Granted Patent
Utility
US 5,329,130 · App. 07/924,638
Charged particle beam exposure method and apparatus
Inventors:
Junichi Kai, Hiroshi Yasuda, Kazutaka Taki, Mitsuhiro Nakano
Patented Case
View Patent ↗
Granted: Jul 12, 1994
Filed: Aug 4, 1992
Inventors
Junichi Kai
Hiroshi Yasuda
Kazutaka Taki
Mitsuhiro Nakano
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.