IP Library › Granted Patent US 5,329,140
Granted Patent Utility
US 5,329,140 · App. 07/954,309

Thin film transistor and its production method

Inventor: Kenji Sera
Patented Case View Patent ↗
Granted: Jul 12, 1994 Filed: Sep 30, 1992
Inventor
Kenji Sera
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,329,140
App. No.
07/954,309
Filed
1992-09-30
Granted
1994-07-12
Kind
A