IP Library › Granted Patent US 5,332,013
Granted Patent Utility
US 5,332,013 · App. 07/850,668

Unmanned conveying device in clean room

Inventors: Masanao Sugita, Hitoshi Kawano, Teppei Yamashita
Patented Case View Patent ↗
Granted: Jul 26, 1994 Filed: Mar 13, 1992
Inventors
Masanao Sugita
Hitoshi Kawano
Teppei Yamashita
Assignee (at issue)
Shinko Electric Co., Ltd.

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Quick Facts
Patent No.
US 5,332,013
App. No.
07/850,668
Filed
1992-03-13
Granted
1994-07-26
Kind
A