Granted Patent
Utility
US 5,332,443 · App. 08/073,958
Lift fingers for substrate processing apparatus
Inventors:
Sandy M. Chew, Shane D. Clark, Ron Rose, Dale R. DuBois, Cissy Leung, Alan F. Morrison, Manus Wong
Patented Case
View Patent ↗
Granted: Jul 26, 1994
Filed: Jun 9, 1993
Inventors
Sandy M. Chew
Shane D. Clark
Ron Rose
Dale R. DuBois
Cissy Leung
Alan F. Morrison
Manus Wong
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.