Granted Patent
Utility
US 5,332,444 · App. 07/982,196
Gas phase cleaning agents for removing metal containing contaminants from integrated circuit assemblies and a process for using the same
Inventors:
Mark George, David A. Bohling
Patented Case
View Patent ↗
Granted: Jul 26, 1994
Filed: Nov 25, 1992
Inventors
Mark George
David A. Bohling
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.