Granted Patent
Utility
US 5,334,844 · App. 08/042,890
Optical illumination and inspection system for wafer and solar cell defects
Inventors:
Howard E. Pollard, Robert E. Neff, Cheryl J. Ajluni
Patented Case
View Patent ↗
Granted: Aug 2, 1994
Filed: Apr 5, 1993
Inventors
Howard E. Pollard
Robert E. Neff
Cheryl J. Ajluni
Assignee (at issue)
Space Systems/Loral, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.