Granted Patent
Utility
US 5,336,324 · App. 07/803,647
Apparatus for depositing a coating on a substrate
Inventors:
Richard A. Stall, Gary S. Tompa, Alexander I. Gurary, Craig R. Nelson
Patented Case
View Patent ↗
Granted: Aug 9, 1994
Filed: Dec 4, 1991
Inventors
Richard A. Stall
Gary S. Tompa
Alexander I. Gurary
Craig R. Nelson
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.