Granted Patent
Utility
US 5,336,355 · App. 07/807,535
Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and films
Inventors:
Charles B. Zarowin, L. David Bollinger
Patented Case
View Patent ↗
Granted: Aug 9, 1994
Filed: Dec 13, 1991
Inventors
Charles B. Zarowin
L. David Bollinger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.