Granted Patent
Utility
US 5,336,638 · App. 07/846,828
Process for manufacturing semiconductor devices
Inventors:
Masayuki Suzuki, Ryo Haruta, Hiroshi Shinriki, Masayuki Nakata
Patented Case
View Patent ↗
Granted: Aug 9, 1994
Filed: Mar 6, 1992
Inventors
Masayuki Suzuki
Ryo Haruta
Hiroshi Shinriki
Masayuki Nakata
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.