Granted Patent
Utility
US 5,337,150 · App. 07/925,721
Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer
Inventor:
Peter B. Mumola
Patented Case
View Patent ↗
Granted: Aug 9, 1994
Filed: Aug 4, 1992
Inventor
Peter B. Mumola
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.