IP Library › Granted Patent US 5,338,394
Granted Patent Utility
US 5,338,394 · App. 07/877,456

Method for etching indium based III-V compound semiconductors

Inventors: Mohammed A. Fathimulla, Thomas C. Loughran
Patented Case View Patent ↗
Granted: Aug 16, 1994 Filed: May 1, 1992
Inventors
Mohammed A. Fathimulla
Thomas C. Loughran
Assignee (at issue)
AlliedSignal, Inc.

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Quick Facts
Patent No.
US 5,338,394
App. No.
07/877,456
Filed
1992-05-01
Granted
1994-08-16
Kind
A