Granted Patent
Utility
US 5,338,652 · App. 08/194,293
Selected structurally defined novolak binder resins and their use in photoresist pattern formation
Inventors:
Thomas R. Sarubbi, Joseph J. Sizensky
Patented Case
View Patent ↗
Granted: Aug 16, 1994
Filed: Feb 9, 1994
Inventors
Thomas R. Sarubbi
Joseph J. Sizensky
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.