Granted Patent
Utility
US 5,338,653 · App. 08/194,193
Phenolic novolak resin compositions containing 5-indanol and their use a process for forming positive resist patterns
Inventor:
Medhat A. Toukhy
Patented Case
View Patent ↗
Granted: Aug 16, 1994
Filed: Feb 9, 1994
Inventor
Medhat A. Toukhy
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.