Granted Patent
Utility
US 5,338,932 · App. 08/000,168
Method and apparatus for measuring the topography of a semiconductor device
Inventors:
N. David Theodore, Juan P. Carrejo
Patented Case
View Patent ↗
Granted: Aug 16, 1994
Filed: Jan 4, 1993
Inventors
N. David Theodore
Juan P. Carrejo
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.