IP Library › Granted Patent US 5,340,370
Granted Patent Utility
US 5,340,370 · App. 08/146,923

Slurries for chemical mechanical polishing

Inventors: Kenneth Cadien, Daniel A. Feller
Patented Case View Patent ↗
Granted: Aug 23, 1994 Filed: Nov 3, 1993
Inventors
Kenneth Cadien
Daniel A. Feller
Assignee (at issue)
Intel Corporation

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Quick Facts
Patent No.
US 5,340,370
App. No.
08/146,923
Filed
1993-11-03
Granted
1994-08-23
Kind
A