Granted Patent
Utility
US 5,340,437 · App. 08/133,980
Process and apparatus for etching semiconductor wafers
Inventors:
Henry F. Erk, Roland R. Vandamme
Patented Case
View Patent ↗
Granted: Aug 23, 1994
Filed: Oct 8, 1993
Inventors
Henry F. Erk
Roland R. Vandamme
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.