Granted Patent
Utility
US 5,340,765 · App. 08/106,503
Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon
Inventors:
Charles H. Dennison, Randhir P. S. Thakur
Patented Case
View Patent ↗
Granted: Aug 23, 1994
Filed: Aug 13, 1993
Inventors
Charles H. Dennison
Randhir P. S. Thakur
Assignee (at issue)
Micron Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.