IP Library › Granted Patent US 5,341,602
Granted Patent Utility
US 5,341,602 · App. 08/047,225

Apparatus for improved slurry polishing

Inventor: Michael G. Foley
Patented Case View Patent ↗
Granted: Aug 30, 1994 Filed: Apr 14, 1993
Inventor
Michael G. Foley
Assignee (at issue)
WILLIAMS INTERNATIONAL CO., L.L.C.

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Quick Facts
Patent No.
US 5,341,602
App. No.
08/047,225
Filed
1993-04-14
Granted
1994-08-30
Kind
A