IP Library › Granted Patent US 5,342,713
Granted Patent Utility
US 5,342,713 · App. 07/949,824

Phase shifting mask

Inventors: Hiroshi Ohtsuka, Kazutoshi Abe, Takashi Taguchi
Patented Case View Patent ↗
Granted: Aug 30, 1994 Filed: Dec 18, 1992
Inventors
Hiroshi Ohtsuka
Kazutoshi Abe
Takashi Taguchi
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.

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Quick Facts
Patent No.
US 5,342,713
App. No.
07/949,824
Filed
1992-12-18
Granted
1994-08-30
Kind
A