IP Library › Granted Patent US 5,342,801
Granted Patent Utility
US 5,342,801 · App. 08/028,026

Controllable isotropic plasma etching technique for the suppression of stringers in memory cells

Inventors: Jeffrey Robert Perry, S. M. Reza Sadjadi, Kristen Luttinger
Patented Case View Patent ↗
Granted: Aug 30, 1994 Filed: Mar 8, 1993
Inventors
Jeffrey Robert Perry
S. M. Reza Sadjadi
Kristen Luttinger
Assignee (at issue)
NATIONAL SEMICONDUCTOR CORPORATION

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Quick Facts
Patent No.
US 5,342,801
App. No.
08/028,026
Filed
1993-03-08
Granted
1994-08-30
Kind
A