IP Library › Granted Patent US 5,342,808
Granted Patent Utility
US 5,342,808 · App. 08/028,643

Aperture size control for etched vias and metal contacts

Inventors: Kristen Brigham, Gary W. Ray
Patented Case View Patent ↗
Granted: Aug 30, 1994 Filed: Mar 9, 1993
Inventors
Kristen Brigham
Gary W. Ray
Assignee (at issue)
Hewlett-Packard Company, L.P.

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Quick Facts
Patent No.
US 5,342,808
App. No.
08/028,643
Filed
1993-03-09
Granted
1994-08-30
Kind
A