Granted Patent
Utility
US 5,344,523 · App. 08/150,837
Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
Inventors:
Clifford D. Fung, Kevin Chau
Patented Case
View Patent ↗
Granted: Sep 6, 1994
Filed: Nov 12, 1993
Inventors
Clifford D. Fung
Kevin Chau
Assignee (at issue)
The Foxboro Comany
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.