IP Library › Granted Patent US 5,345,815
Granted Patent Utility
US 5,345,815 · App. 07/954,695

Atomic force microscope having cantilever with piezoresistive deflection sensor

Inventors: Thomas R. Albrecht, Marco Tortonese, Robert R. Barrett
Patented Case View Patent ↗
Granted: Sep 13, 1994 Filed: Sep 30, 1992
Inventors
Thomas R. Albrecht
Marco Tortonese
Robert R. Barrett
Assignee (at issue)
Board of Trustees Leland Stanford Jr University

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Quick Facts
Patent No.
US 5,345,815
App. No.
07/954,695
Filed
1992-09-30
Granted
1994-09-13
Kind
A