Granted Patent
Utility
US 5,350,484 · App. 07/941,412
Method for the anisotropic etching of metal films in the fabrication of interconnects
Inventors:
Donald S. Gardner, Xiao-Chun Mu, David B. Fraser
Patented Case
View Patent ↗
Granted: Sep 27, 1994
Filed: Sep 8, 1992
Inventors
Donald S. Gardner
Xiao-Chun Mu
David B. Fraser
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.