IP Library › Granted Patent US 5,350,487
Granted Patent Utility
US 5,350,487 · App. 08/057,005

Method of etching polyimide

Inventors: Thomas J. Ameen, John A. Payak, Jerome M. Cangelosi
Patented Case View Patent ↗
Granted: Sep 27, 1994 Filed: May 3, 1993
Inventors
Thomas J. Ameen
John A. Payak
Jerome M. Cangelosi

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Quick Facts
Patent No.
US 5,350,487
App. No.
08/057,005
Filed
1993-05-03
Granted
1994-09-27
Kind
A