Granted Patent
Utility
US 5,352,249 · App. 07/937,793
Apparatus for providing consistent, non-jamming registration of semiconductor wafers
Inventor:
Joseph F. Vollaro
Patented Case
View Patent ↗
Granted: Oct 4, 1994
Filed: Aug 28, 1992
Inventor
Joseph F. Vollaro
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.