Granted Patent
Utility
US 5,353,322 · App. 08/065,116
Lens system for X-ray projection lithography camera
Inventors:
John H. Bruning, Anthony R. Phillips, Jr., David Shafer, Alan D. White
Patented Case
View Patent ↗
Granted: Oct 4, 1994
Filed: May 20, 1993
Inventors
John H. Bruning
Anthony R. Phillips, Jr.
David Shafer
Alan D. White
Assignee (at issue)
Tropel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.