IP Library Granted Patent US 5,356,739
Granted Patent Utility
US 5,356,739 · App. 08/007,818

Stainproof protector made from fluorine-containing aliphatic cyclic polymer for preventing staining of lithographic masks

Inventors: Toru Kawasaki, Masao Unoki, Masaru Nakamura
Patented Case View Patent ↗
Granted: Oct 18, 1994 Filed: Jan 22, 1993
Inventors
Toru Kawasaki
Masao Unoki
Masaru Nakamura
Assignee (at issue)
ASAHI GLASS CO., LTD.

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Quick Facts
Patent No.
US 5,356,739
App. No.
08/007,818
Filed
1993-01-22
Granted
1994-10-18
Kind
A