IP Library Granted Patent US 5,356,752
Granted Patent Utility
US 5,356,752 · App. 07/920,848

Compounds with acid-labile protective groups useful in positive-working radiation-sensitive mixtures

Inventors: Ivan Cabrera, Walter Spiess
Patented Case View Patent ↗
Granted: Oct 18, 1994 Filed: Jul 28, 1992
Inventors
Ivan Cabrera
Walter Spiess
Assignee (at issue)
Hoechst GmbH

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Quick Facts
Patent No.
US 5,356,752
App. No.
07/920,848
Filed
1992-07-28
Granted
1994-10-18
Kind
A