Granted Patent
Utility
US 5,357,312 · App. 08/128,002
Illuminating system in exposure apparatus for photolithography
Inventor:
Keiichiro Tounai
Patented Case
View Patent ↗
Granted: Oct 18, 1994
Filed: Sep 28, 1993
Inventor
Keiichiro Tounai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.