Granted Patent
Utility
US 5,360,698 · App. 07/947,589
Deep UV lift-off resist process
Inventor:
Michael J. Hanrahan
Patented Case
View Patent ↗
Granted: Nov 1, 1994
Filed: Sep 21, 1992
Inventor
Michael J. Hanrahan
Assignee (at issue)
EASTMAN KODAK COMPANY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.