IP Library › Granted Patent US 5,360,752
Granted Patent Utility
US 5,360,752 · App. 08/142,030

Method to radiation harden the buried oxide in silicon-on-insulator structures

Inventors: Frederick Brady, Nadim F. Haddad
Patented Case View Patent ↗
Granted: Nov 1, 1994 Filed: Oct 28, 1993
Inventors
Frederick Brady
Nadim F. Haddad
Assignee (at issue)
Loral Federal Systems Company

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Quick Facts
Patent No.
US 5,360,752
App. No.
08/142,030
Filed
1993-10-28
Granted
1994-11-01
Kind
A