Granted Patent
Utility
US 5,360,768 · App. 07/784,434
Method of forming oxide film
Inventors:
Tadahiro Ohmi, Mizuho Morita
Patented Case
View Patent ↗
Granted: Nov 1, 1994
Filed: Nov 6, 1991
Inventors
Tadahiro Ohmi
Mizuho Morita
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.