IP Library Granted Patent US 5,362,597
Granted Patent Utility
US 5,362,597 · App. 07/888,635

Radiation-sensitive resin composition comprising an epoxy-containing alkali-soluble resin and a naphthoquinone diazide sulfonic acid ester

Inventors: Kimiyasu Sano, Osahiko Tomomitsu, Masayuki Endoh, Yasuaki Yokoyama
Patented Case View Patent ↗
Granted: Nov 8, 1994 Filed: May 27, 1992
Inventors
Kimiyasu Sano
Osahiko Tomomitsu
Masayuki Endoh
Yasuaki Yokoyama
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,362,597
App. No.
07/888,635
Filed
1992-05-27
Granted
1994-11-08
Kind
A