Granted Patent
Utility
US 5,362,672 · App. 07/465,175
Method of forming a monocrystalline film having a closed loop step portion on the substrate
Inventors:
Tadahiro Ohmi, Tadashi Shibata, Masaru Umeda
Patented Case
View Patent ↗
Granted: Nov 8, 1994
Filed: Feb 1, 1990
Inventors
Tadahiro Ohmi
Tadashi Shibata
Masaru Umeda
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.