Granted Patent
Utility
US 5,362,969 · App. 08/052,401
Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors
Inventor:
Daniel E. Glenn
Patented Case
View Patent ↗
Granted: Nov 8, 1994
Filed: Apr 23, 1993
Inventor
Daniel E. Glenn
Assignee (at issue)
Luxtron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.