IP Library Granted Patent US 5,363,867
Granted Patent Utility
US 5,363,867 · App. 08/006,318

Article storage house in a clean room

Inventors: Hitoshi Kawano, Atsushi Okuno, Masanori Tsuda, Mitsuhiro Hayashi, Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Akio Nakamura
Patented Case View Patent ↗
Granted: Nov 15, 1994 Filed: Jan 21, 1993
Inventors
Hitoshi Kawano
Atsushi Okuno
Masanori Tsuda
Mitsuhiro Hayashi
Teppei Yamashita
Masanao Murata
Tsuyoshi Tanaka
Teruya Morita
Akio Nakamura
Assignee (at issue)
Shinko Electric Co., Ltd.

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Quick Facts
Patent No.
US 5,363,867
App. No.
08/006,318
Filed
1993-01-21
Granted
1994-11-15
Kind
A