IP Library Granted Patent US 5,364,481
Granted Patent Utility
US 5,364,481 · App. 08/095,721

Apparatus for manufacturing a thin-film photovoltaic conversion device

Inventors: Toshiaki Sasaki, Hitoshi Shimizu
Patented Case View Patent ↗
Granted: Nov 15, 1994 Filed: Jul 21, 1993
Inventors
Toshiaki Sasaki
Hitoshi Shimizu
Assignee (at issue)
FUJI ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 5,364,481
App. No.
08/095,721
Filed
1993-07-21
Granted
1994-11-15
Kind
A