Granted Patent
Utility
US 5,365,340 · App. 07/987,926
Apparatus and method for measuring the thickness of thin films
Inventor:
Anthony M. Ledger
Patented Case
View Patent ↗
Granted: Nov 15, 1994
Filed: Dec 10, 1992
Inventor
Anthony M. Ledger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.