Granted Patent
Utility
US 5,366,607 · App. 07/995,688
Sputtering target and assembly
Inventors:
Brij B. Lal, Tadashi Shinohara
Patented Case
View Patent ↗
Granted: Nov 22, 1994
Filed: Dec 23, 1992
Inventors
Brij B. Lal
Tadashi Shinohara
Assignee (at issue)
HMT Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.