Granted Patent
Utility
US 5,366,852 · App. 07/948,022
Methods for treating photoresists
Inventors:
Edward K. Pavelchek, Peter W. Freeman, John F. Bohland, Susan K. Jones, Bruce W. Dudley
Patented Case
View Patent ↗
Granted: Nov 22, 1994
Filed: Sep 21, 1992
Inventors
Edward K. Pavelchek
Peter W. Freeman
John F. Bohland
Susan K. Jones
Bruce W. Dudley
Assignees (at issue)
Shipley Company, L.L.C.
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.