Granted Patent
Utility
US 5,368,901 · App. 07/945,766
Method for the production of a bottom resist
Inventors:
Rainer Leuschner, Recai Sezi, Michael Sebald
Patented Case
View Patent ↗
Granted: Nov 29, 1994
Filed: Sep 16, 1992
Inventors
Rainer Leuschner
Recai Sezi
Michael Sebald
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.