IP Library › Granted Patent US 5,370,274
Granted Patent Utility
US 5,370,274 · App. 08/124,109

Apparatus for cleaning a wafer surface

Inventors: Tadahiro Ohmi, Tadashi Shibata
Patented Case View Patent ↗
Granted: Dec 6, 1994 Filed: Sep 20, 1993
Inventors
Tadahiro Ohmi
Tadashi Shibata

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Quick Facts
Patent No.
US 5,370,274
App. No.
08/124,109
Filed
1993-09-20
Granted
1994-12-06
Kind
A