IP Library Granted Patent US 5,370,568
Granted Patent Utility
US 5,370,568 · App. 08/030,980

Curing of a tungsten filament in an ion implanter

Inventors: Dottie Ivins, Johnny B. Holbrook, Randy James Holder, Thomas E. Sepanik, Jack W. Jinkins
Patented Case View Patent ↗
Granted: Dec 6, 1994 Filed: Mar 12, 1993
Inventors
Dottie Ivins
Johnny B. Holbrook
Randy James Holder
Thomas E. Sepanik
Jack W. Jinkins
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 5,370,568
App. No.
08/030,980
Filed
1993-03-12
Granted
1994-12-06
Kind
A