Granted Patent
Utility
US 5,370,779 · App. 08/126,790
ECR plasma process
Inventors:
Kazuo Ohba, Yoshinori Shima, Akira Ohba
Patented Case
View Patent ↗
Granted: Dec 6, 1994
Filed: Sep 24, 1993
Inventors
Kazuo Ohba
Yoshinori Shima
Akira Ohba
Assignees (at issue)
Sakae Electronics Industrial Co., Ltd.
Kazuo Ohba
Yoshinori Shima
Akira Ohba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.