Granted Patent
Utility
US 5,370,969 · App. 07/922,983
Trilayer lithographic process
Inventor:
David A. Vidusek
Patented Case
View Patent ↗
Granted: Dec 6, 1994
Filed: Jul 28, 1992
Inventor
David A. Vidusek
Assignees (at issue)
SHARP KABUSHIKI KAISHA
Sharp Microelectronics Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.