Granted Patent
Utility
US 5,372,647 · App. 08/081,372
Apparatus for forming thin film
Inventor:
Tadahiro Ohmi
Patented Case
View Patent ↗
Granted: Dec 13, 1994
Filed: Oct 13, 1993
Inventor
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.