IP Library › Granted Patent US 5,374,315
Granted Patent Utility
US 5,374,315 · App. 08/133,659

Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment

Inventors: Wiebe B. deBoer, Albert E. Ozias
Patented Case View Patent ↗
Granted: Dec 20, 1994 Filed: Oct 7, 1993
Inventors
Wiebe B. deBoer
Albert E. Ozias
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.

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Quick Facts
Patent No.
US 5,374,315
App. No.
08/133,659
Filed
1993-10-07
Granted
1994-12-20
Kind
A