Granted Patent
Utility
US 5,376,498 · App. 07/975,713
Negative type radiation-sensitive resin composition
Inventors:
Toru Kajita, Eiichi Kobayashi, Toshiyuki Ota, Takao Miura
Patented Case
View Patent ↗
Granted: Dec 27, 1994
Filed: Nov 13, 1992
Inventors
Toru Kajita
Eiichi Kobayashi
Toshiyuki Ota
Takao Miura
Assignee (at issue)
Japan Synthetic Rubber Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.